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OAI
685 River Oaks Parkway
San Jose, CA 95134 USA
phone: 1-408-323-0600
fax: 1-408-433-9904
www.oainet.com

Booth 15

OAI offers Front & Backside Mask Aligners, Collimated UV Light Sources, a rapid prototyping process (CLiPP) for making Microfluidic Devices, an economic option for Nanoimprinting & UV Ozone treatment systems for improved surface adhesion. OAI maintains engineering & support worldwide. Along with OAI are the products of SPS-Europe. These include versatile Spin Processors & Coaters for table top to full size Spin Process Stations, bare wafers, hot plate for soft bake or photoresist & PTFE process tanks.

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