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Heidelberg Instruments, Inc.
500 West Cummings Park, Suite 4950
Woburn, MA 01801 USA
phone: 1-781-287-9758
info@himt.de
www.himt.de
Booth 22
Heidelberg Instruments Mikrotechnik GmbH is the world leader in the production of high precision photolithography systems and Maskless Aligners. Heidelberg Instruments has an installation base of over 800 systems in more than 30 countries. Our optical direct write lithography systems are installed in academic and industrial sites and are used in research, development and production. Applications Include Photomask Manufacturing, MEMS, MOEMS, Micro-fluidics, CMOS, LED and Display Technologies.
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