MicroTAS 2017 Conference - October 22-26, 2017

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Industrial Stage

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Oxford Instruments
North End, Yatton
Bristol, B54 4AP UK
phone: +44-1934-837-000
fax: +44-1934-837-001
plasma@oxinst.com
www.oxinst.com

Booth 45

Oxford Instruments Plasma Technology offers flexible, configurable process tools and leading-edge processes for the precise, controllable and repeatable engineering of micro- and nano-structures. Our systems provide process solutions for the etching of nanometre sized features, nanolayer deposition and the controlled growth of nanostructures.

These solutions are based on core technologies in plasma-enhanced deposition and etch, ion-beam deposition and etch, atomic layer etch and deposition and deep silicon etch.

Products range from compact stand-alone systems for R&D, through batch tools and up to clustered cassette-to-cassette platforms for high-throughput production processing.