Heidelberg Instruments Mikrotechnik GmbH
Tullastrasse 2
Heidelberg, 69126 GERMANY
phone: +49-6221-3430-0
fax: +49-6221-3430-30
info@himt.de
www.himt.de
Booth 16
With an installation base of over 600 systems in more than 50 countries, Heidelberg Instruments is a world leader in production of high precision maskless lithography systems. Due to their flexibility, these systems are used in research, development and industrial applications for direct writing and photomask production by some of the most prestigious universities and industry leaders in the areas of MEMS, BioMEMS, ASICs, TFT, Displays, Micro Optics and many other related applications.