Sponsors / Exhibits

---

Booth Availability

Industrial Stage

Sponsor / Exhibitor
Prospectus



<< Back

For over 40 years, OAI engineers and manufactures precision lithography equipment for MEMS, Semiconductor and Microfluidics used in both R&D and Production. Products offered are UV Light Sources for the development of single-level microfluidic devices, and Mask Aligners for multilevel devices. Also available are the Kloe Direct Write Maskless Lithography Systems with large depth of field for multilevel devices. To measure UV energy and intensity, OAI has UV meters for all UV exposure systems. With installations worldwide, OAI maintains engineering and field service availability.